Front End Equipment  |  Back End Equipment  |  Spare Parts   MODEL: VF-5300B TISI ID 11252 Manufacturer Koyo Thermo System Model VF-5300B Description Polyimde Bake Wafer Size 200mm Vintage 1998 Quantity 1 Sale Condition as-is Lead Time Immediately Download Comment . Pic Prev BOE Frontend Next CONVAC 6000