Front End Equipment  |  Back End Equipment  |  Spare Parts   MODEL: ILD-4002 TISI ID 20151106-65 Manufacturer CANON ANELVA Model ILD-4002 Description Dry etching system (SiO2) Wafer Size Vintage 1983 Quantity 1 Sale Condition As-is Where-is Lead Time Immediately Download Comment ` Pic Prev ILD-4003M Next UHO-2505