MODEL: Centura HDPCVD
TISI ID 11515
Manufacturer AMAT
Model Centura HDPCVD
Description Ultima Plus Retrofit including ENI generator
Wafer Size 200mm/150mm
Category 30 days after PO
Quantity
Sales Condition
Lead Time 30 days after PO
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Centura HDPCVD Ultima Plus Retrofit from Ultima Standard

- ENI Generator retrofit

- Gas Pallet retrofit (for USG, FSG, PSG...)

- MKS RPS retrofit

-Turbo pump/Gate valve retofit

- 24 Gas Ring with Nozzle retrofit ( from 18 nozzle )

- Balanced Side coil retrofit from standard


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